Technical Library
Sensors provide faster throughput with fast prefocus
QuikApps — Prefocus Positioning of Silicon Wafer for Lithography, Inspection, or Post-Processing
Silicon wafers undergo multiple processes during fabrication. Some processes require precise focus such as electron microscopy, lithography, or post-processing with lasers.
Using a capacitive or eddy-current sensor to monitor position of the hardware holding the wafer can provide accurate focus and/or reduce throughput by providing a fast prefocus position.
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