CPA100 and CPA100e Measurement Ranges and Probes

Probe Sensing Area | Ranges and Resolutions

Probe Sensing Area

The sensing area determines the probe's measurement range.

Larger Sensing Area = Larger Range

Sensing areas are indicated by their diameter in mm and are combined with the probe body style to form a probe model number such as C3-0.8 (C3 body style and 0.8 mm diameter sensing area) or C18-13 (C18 body style and 13 mm sensing area).

Custom probes are available.

Full-scale range and Near Gap are adjustable using the CPA100 adjustable gain and zero.

Probes can be ordered as vacuum compatible.

Terms

CPA100 Ranges/Resolutions - Sorted by Sensing Area Size

Larger Sensing Area = Larger Range

1 mil = 0.001"

Probes			Ranges
Sensing Area Diameter mm	Min. Target Diam.	Body Size Options	Standard				Extended
	mm inch		Range µm mils	Near Gap µm mils	CPA100 Resolution* nm µinch	CPA100e Resolution* nm µinch	Range µm mils	Near Gap µm mils	CPA100 Resolution* nm µinch	CPA100e Resolution* nm µinch
0.5	0.8 0.03		50 2.0	50 2.0	55 2.5	400 16	80** 3.0	60 2.5	100 4.0	400 16
0.8	1.0 0.04		100 4.0	100 4.0	55 2.5	400 16	—	—	—	—
2.0	2.5 0.10		250 10.0	125 5.0	50 2.0	400 16	500 20.0	125 5.0	55 2.5	400 16
3.2	4.1 0.16		500 20.0	250 10.0	85 3.5	400 16	1250 50.0	250 10.0	125 5.0	400 16
5.6	7.6 0.30		500 20.0	500 20.0	140 5.5	400 16	2000 80.0	250 10.0	170 7.0	400 16
13	18 0.71		3200 125	2000 80	1000 40	1000 40	5000 200	3000 120	1600 63	1600 63
19	25 1.0		2500 100.0	5000 200	1400 55	1400 55	6000 250.0	3000 120	1100 43	1100 43
21	30 1.2		8000 300	5000 20	1200 47	1200 47	12500 500	5000 20	1600 63	1600 63

* Resolution is RMS value at midrange. P-P resolution is 8-10 times higher.
** 0.5 sensing area limited to 10 kHz bandwidth in extended range