Capacitive Sensors

Capacitive Sensor: Compact Driver
Multi-Channel Driver

Up to six channels of high-resolution capacitive displacement sensors in a compact package.

Perfect for OEM/Embedded applications.

Features | Specifications | Probes & Ranges | Mechanical

Up to Six Channels
Ranges Available: 25 µm to 2.5 mm
±10 V Output
15 kHz Bandwidth
0.008% Resolution @ 15 kHz (RMS) (Probe/Range dependent, see range chart for details)
Individually calibrated for maximum performance
No User Adjustments
Differential and Single-Ended Outputs
Small Size, High Density Package
OEM and Embedded Applications
Separate Power and Signal "D" Connectors
±15 VDC Power
Standard Probes can be ordered as vacuum compatible.

Life-Cycle Status: Active

Specifications

Typical specifications. Actual values depend on probe and calibration. See Probes and Ranges for details.

Resolution	0.008% F.S. RMS 0.08% F.S. P-P
Bandwidth	Up to 15 kHz(-3dB)
Linearity	0.2% F.S.
Error Band	0.3% F.S.
Maximum Drift	0.02% F.S./°F 0.04% F.S./°C
Output Voltage	±10 V
Output Impedance	0 ohms
Operating Temperature	40°F-120°F 4°C-50°C
Input Power	±15 VDC @ 50 mA/channel

Compact Driver Ranges/Resolutions - Probe Dependent

Larger Sensing Area = Larger Range

Target: Flat, Diameter > 130% Sensing Area Diameter
or custom calibration required

Probes can be ordered as vacuum compatible. custom probes are available.

45 degree probe 45 degree probe small coin probe right angle probe goldPlatePuck

Custom calibrations can achieve exceptional resolution performance

probe-sensor

1 mil = 0.001"

Standard Probes		Calibration Type
Sensing Area Diameter	Body Styles Click model for probe shape/size options	— Fine —					— Standard —
		Range µm mils	Near Gap µm mils	Resolution*		Lin. %FS	Range µm mils	Near Gap µm mils	Resolution*		Lin. %FS
		Range µm mils	Near Gap µm mils	BW Hz	nm µin	Lin. %FS	Range µm mils	Near Gap µm mils	BW Hz	nm µin	Lin. %FS
2.0		50 2.0	75 3.0	15k	4.0 0.16	0.15	250 10.0	125 5.0	15k	18 0.70	0.10
3.2		50 2.0	125 5.0	15k	8.0 0.32	0.20	500 20.0	250 10.0	15k	20 0.80	0.15
5.6		50 2.0	225 9.0	15k	3.2 0.12	0.20	500 20.0	500 20.0	15k	24 0.94	0.20
19		—	—	—	—	—	2500 100.0	5000 200	15k	200 8.0	0.20

* Resolution values are RMS. Peak-to-peak values are typically ten times greater than the RMS values.

Mechanical Specifications

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Capacitive Sensors

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Capacitive Sensor: Compact Driver Multi-Channel Driver

Specifications

Resolution

Bandwidth

Linearity

Error Band

Maximum Drift

Output Voltage

Output Impedance

Operating Temperature

Input Power

Compact Driver Ranges/Resolutions - Probe Dependent

Standard Probes

Calibration Type

Sensing Area

Body Styles

— Fine —

— Standard —

Range

Near Gap

Resolution*

Lin.